Bilateral Microscope System "TOMOS-60XY"
Equipped with an XY electric stage and autofocus function! Customization for software and more is also supported.
The "TOMOS-60XY" is a 6-inch electric XY stage dual-sided microscope system that can automatically measure multiple locations on a workpiece. It can automatically move to the specified measurement locations on the workpiece and measure the misalignment of crystal oscillators, MEMS, semiconductor wafers, and electronic component patterns and alignment marks. Additionally, it is equipped with an alignment function to correct the positional deviation between the XY stage and the workpiece, ensuring accurate movement control and preventing measurement errors. 【Features】 - Automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the deviation between their center coordinates. - Controls XYZ stage conditions, measurement conditions, creates maps, and registers recipes to automatically measure multiple locations on the workpiece. *For more details, please download the PDF or feel free to contact us.
- Company：フローベル
- Price：Other
